Searching for refractory plasmonic materials: The structural and optical properties of Au3Zr intermetallic thin films

Optical properties of refractory intermetallic thin films Au3Zr were experimentally investigated for the first time, which show distinctive plasmonic in visible and near infrared region. The fabricated through DC magnetron sputtering at various deposition temperature ranging from room to 427 °C annealed different vacuum levels. Both structural optical are found be critically dependent on anneal conditions. Films deposited between 205 320 shown exhibit lower negative permittivity better thermal stability, could linked specific crystalline orientations. stable when 10−8 Torr, but partially oxidized 10−6 suggesting oxidization a restricting issue high-temperature applications ambient environment.